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Effect of Annealing Treatment on the Optical Properties of Zinc Oxide (ZnO) thin film prepared by MOCVD

Journal of Mathematical and Fundamental Sciences · Vol. 33 No. 1 (2019) · hlm. 21–23

ISSN
2338-5510, 2337-5760
Terbit
2019-01-18
Penerbit
Directorate for Research and Innovation (DRI) ITB
Bahasa
eng

Abstrak

The annealing treatment of ZnO thin film at various temperatures was performed. The effect of this treatment on the optical properties of ZnO thin film were investigated in order to apply this film to optoelectronic devices. The optical transmittance spectra were measured and it was found that the transmittance in UV-VIS region decreased with annealing temperature. The loss of light is mainly due to the increase of carrier density, resulting from increased oxygen vacancies during the annealing process at 300°C. It was also found that the absorption edge shifted to lower energy when the film was annealed at 300°C in air.

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  • Muhammadiyah University of Surakarta
  • IPB University
  • National Research and Innovation Agency
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Rekan penulisOrganisasiArtikel bersama
D DilahurMuhammadiyah University of Surakarta1
Choirul AminMuhammadiyah University of Surakarta1
Muhammad Farid AminudinMuhammadiyah University of Surakarta1
‪Kuswaji Dwi PriyonoMuhammadiyah University of Surakarta1
Yuli PriyanaMuhammadiyah University of Surakarta1
Fery AdriyantoAfiliasi tidak diketahui1
Riyatun RiyatunAfiliasi tidak diketahui1
Usman SantosaAfiliasi tidak diketahui1
Rita NurmalinaIPB University1
Burhanuddin BurhanuddinIPB University1
Nyak IlhamNational Research and Innovation Agency1

Afiliasi berasal dari OpenAlex; metadata OAI-PMH jurnal tidak memuatnya. Penulis tanpa ID OpenAlex dicocokkan berdasarkan nama, sehingga dua orang bisa tergabung atau satu orang bisa terpisah.

Sumber metadata: OAI-PMH (metadata jurnal) https://journals.itb.ac.id/index.php/jmfs/oai, pertama di-harvest 9 Nov 2026, terakhir terlihat 9 Nov 2026.
Metadata asli (oai_dc) 
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	<dc:title xml:lang="en-US">Effect of Annealing Treatment on the Optical Properties of Zinc Oxide (ZnO) thin film prepared by MOCVD</dc:title>
	<dc:creator>Nurhasanah, Iis</dc:creator>
	<dc:creator>Priyono, Priyono</dc:creator>
	<dc:creator>Wenas, Wilson W</dc:creator>
	<dc:subject xml:lang="en-US">Annealing</dc:subject>
	<dc:subject xml:lang="en-US">optical properties</dc:subject>
	<dc:subject xml:lang="en-US">transmittance spectra</dc:subject>
	<dc:subject xml:lang="en-US">ZnO</dc:subject>
	<dc:description xml:lang="en-US">The annealing treatment of ZnO thin film at various temperatures was performed. The effect of this treatment on the optical properties of ZnO thin film were investigated in order to apply this film to optoelectronic devices. The optical transmittance spectra  were measured and it was found that the transmittance in UV-VIS region decreased with annealing temperature . The loss of light is mainly due to  the increase of carrier density, resulting from increased oxygen vacancies during the annealing process at 300°C. It was also found that the absorption edge shifted to lower energy when the film was annealed at 300°C in air.</dc:description>
	<dc:publisher xml:lang="en-US">Directorate for Research and Innovation (DRI) ITB</dc:publisher>
	<dc:date>2019-01-18</dc:date>
	<dc:type>info:eu-repo/semantics/article</dc:type>
	<dc:type>info:eu-repo/semantics/publishedVersion</dc:type>
	<dc:format>application/pdf</dc:format>
	<dc:identifier>https://journals.itb.ac.id/index.php/jmfs/article/view/9230</dc:identifier>
	<dc:source xml:lang="en-US">Journal of Mathematical and Fundamental Sciences; Vol. 33 No. 1 (2001); 21-23</dc:source>
	<dc:source>2338-5510</dc:source>
	<dc:source>2337-5760</dc:source>
	<dc:language>eng</dc:language>
	<dc:relation>https://journals.itb.ac.id/index.php/jmfs/article/view/9230/3488</dc:relation>
</oai_dc:dc>