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KONDUKTIVITAS DAN TRANSMITANSI FILM TIPIS zinc oxide YANG DIDEPOSISIKAN PADA TEMPERATUR RUANG

Unnes Physics Journal · Vol. 2 No. 1 (2013)

ISSN
2252-6978
Terbit
2013-06-12
Penerbit
Unnes Physics Journal
Bahasa
eng

Abstrak

zinc oxide thin films have been successfully deposited at room temperature with a plasma power 20 W, 30 W, and 40 W using dc magnetron sputtering method. The crystal structure of films were characterized using XRD (X-ray diffraction). Optical transmittance characterized by UV-vis spectrometer and electrical conductivity determined by analysis of results from I-V measurement. ZnO thin films on a plasma power of 30 W and 40 W have a polycrystalline structure, while the plasma power of 20 W has a crystalline structure that tends to amorphous. The orientation (100) has the highest intensity and the value of full width half maximum (FWHM) at the smallest plasma power 30 W. The resulting transmittance spectrum shows interference fringe pattern. Transmittance value the greater the enhancement of plasma with the largest value of ~ 92% owned plasma power 40 W. The magnitude of the energy gap depends on the amount of power generated at the plasma deposition. The resulting film conductivity value between 1.16 to 4.02 x10-6 x10-7 so that it can be applied for transparent conductive oxide (TCO)

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  • State University of Semarang
  • Universitas Nahdlatul Ulama Blitar
  • Sekolah Tinggi Ilmu Tarbiyah Hamzah Al-Fansuri Sibolga Barus
  • National Research and Innovation Agency
  • University of Indonesia
  • Yogyakarta State University
  • Afiliasi tidak diketahui
  • Organisasi berbeda
  • Organisasi sama
  • Afiliasi tidak diketahui
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Tampilkan sebagai tabel
Rekan penulisOrganisasiArtikel bersama
Ani RusilowatiState University of Semarang7
Sugianto SugiantoUniversitas Nahdlatul Ulama Blitar7
Agus YuliantoAfiliasi tidak diketahui7
Budi AstutiAfiliasi tidak diketahui5
Bambang SubaliAfiliasi tidak diketahui5
Sulhadi SulhadiAfiliasi tidak diketahui4
Sunyoto Eko NugrohoState University of Semarang4
Teguh DarsonoAfiliasi tidak diketahui3
SugiantoAfiliasi tidak diketahui3
Mahardika Prasetya AjiAfiliasi tidak diketahui3
Siti NoviyatunSekolah Tinggi Ilmu Tarbiyah Hamzah Al-Fansuri Sibolga Barus2
Siti WahyuniAfiliasi tidak diketahui2
Teguh Hardi RaharjoAfiliasi tidak diketahui2
WidiyantoAfiliasi tidak diketahui2
NUR HAMIDAfiliasi tidak diketahui2
Arif WidiyatmokoState University of Semarang2
Sudarmin SudarminAfiliasi tidak diketahui2
Suharto LinuwihAfiliasi tidak diketahui2
Hardi SuyitnoAfiliasi tidak diketahui2
Hadi SusantoNational Research and Innovation Agency2
Fianti FiantiAfiliasi tidak diketahui2
Muqoyyanah MuqoyyanahAfiliasi tidak diketahui2
A. RositaAfiliasi tidak diketahui1
SudarminState University of Semarang1
Rene M. Babiera IIAfiliasi tidak diketahui1
Nadila Qotrun NadaAfiliasi tidak diketahui1
Zahrotul AiniAfiliasi tidak diketahui1
Dwi YuliantiState University of Semarang1
Faiz Fajar ShafiraState University of Semarang1
Bambang SubaliState University of Semarang1
Fianti FiantiState University of Semarang1
Eka NurhidayahUniversity of Indonesia1
Husna ArifahYogyakarta State University1
Sugiyanto SugiyantoAfiliasi tidak diketahui1
SugiyantoAfiliasi tidak diketahui1
Secho Nur FaizahAfiliasi tidak diketahui1
Rina WidyawatiAfiliasi tidak diketahui1

Afiliasi berasal dari OpenAlex; metadata OAI-PMH jurnal tidak memuatnya. Penulis tanpa ID OpenAlex dicocokkan berdasarkan nama, sehingga dua orang bisa tergabung atau satu orang bisa terpisah.

Sumber metadata: OAI-PMH (metadata jurnal) https://journal.unnes.ac.id/sju/index.php/upj/oai, pertama di-harvest 6 Nov 2026, terakhir terlihat 6 Nov 2026.
Metadata asli (oai_dc) 
<oai_dc:dc xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/  http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
	<dc:title xml:lang="en-US">KONDUKTIVITAS DAN TRANSMITANSI FILM TIPIS zinc oxide YANG DIDEPOSISIKAN PADA TEMPERATUR RUANG</dc:title>
	<dc:creator>wahyuningsih, kiki</dc:creator>
	<dc:creator>Marwoto, Putut</dc:creator>
	<dc:creator>Sulhadi, -</dc:creator>
	<dc:description xml:lang="en-US">zinc oxide thin films have been successfully deposited at room temperature with a plasma power 20 W, 30 W, and 40 W using dc magnetron sputtering method. The crystal structure of films were characterized using XRD (X-ray diffraction). Optical transmittance characterized by UV-vis spectrometer and electrical conductivity determined by analysis of results from I-V measurement. ZnO thin films on a plasma power of 30 W and 40 W have a polycrystalline structure, while the plasma power of 20 W has a crystalline structure that tends to amorphous. The orientation (100) has the highest intensity and the value of full width half maximum (FWHM) at the smallest plasma power 30 W. The resulting transmittance spectrum shows interference fringe pattern. Transmittance value the greater the enhancement of plasma with the largest value of ~ 92% owned plasma power 40 W. The magnitude of the energy gap depends on the amount of power generated at the plasma deposition. The resulting film conductivity value between 1.16 to 4.02 x10-6 x10-7 so that it can be applied for transparent conductive oxide (TCO)   </dc:description>
	<dc:publisher xml:lang="en-US">Unnes Physics Journal</dc:publisher>
	<dc:date>2013-06-12</dc:date>
	<dc:type>info:eu-repo/semantics/article</dc:type>
	<dc:type>info:eu-repo/semantics/publishedVersion</dc:type>
	<dc:type xml:lang="en-US">Peer-reviewed Article</dc:type>
	<dc:format>application/pdf</dc:format>
	<dc:identifier>https://journal.unnes.ac.id/sju/upj/article/view/1368</dc:identifier>
	<dc:source xml:lang="en-US">Unnes Physics Journal; Vol 2 No 1 (2013)</dc:source>
	<dc:source>2252-6978</dc:source>
	<dc:language>eng</dc:language>
	<dc:relation>https://journal.unnes.ac.id/sju/upj/article/view/1368/1339</dc:relation>
</oai_dc:dc>